TY  - BOOK
AU  - de Groot, Peter, ed.
TI  - Optics and Photonics for Advanced Dimensional Metrology
T2  - Proceedings of SPIE; V. 11352
SN  - 9781510634763 (Print)
PY  - 2020///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11352
ER  -