00561nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002500119245006900144260003200213300002000245490003400265856010400299IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510634763 (Print)  a9781510634770 (Online)  cIIA Library  ade Groot, Peter, ed. 0aOptics and Photonics for Advanced Dimensional Metrologyh[eBook]  aWashington, USAbSPIEc2020  aOnline resource  aProceedings of SPIE; V. 11352  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/11352yClick Here to Access eBook