de Groot, Peter, ed. <br/><br/>
Optics and Photonics for Advanced Dimensional Metrology  [eBook] 

 - Washington, USA  SPIE  2020 
 - Online resource 
 - Proceedings of SPIE; V. 11352 .
<br/><br/><label>ISBN: </label>9781510634763 (Print) 9781510634770 (Online)