@book{30228,
	author = {de Groot, Peter, ed.},
	title = {Optics and Photonics for Advanced Dimensional Metrology},
	publisher = {SPIE},
	year = {2020},
	series = {Proceedings of SPIE; V. 11352},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11352}
}