@book{30199,
	author = {Brunner, Timothy, ed.},
	title = {Optical/Laser Microlithography VIII},
	publisher = {SPIE},
	year = {1995},
	series = {Proceedings of SPIE; V. 2440},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2440}
}