TY  - BOOK
AU  - Brunner, Timothy, ed.
TI  - Optical/Laser Microlithography VII
T2  - Proceedings of SPIE; V. 2197
SN  - 9780819414922 (Print)
PY  - 1994///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2197
ER  -