@book{30198,
	author = {Brunner, Timothy, ed.},
	title = {Optical/Laser Microlithography VII},
	publisher = {SPIE},
	year = {1994},
	series = {Proceedings of SPIE; V. 2197},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2197}
}