00496nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002400092245004600116260003200162300002000194490003300214856010300247IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819408297 (Print)  cIIA Library  aCuthbert, John, ed. 0aOptical/Laser Microlithography Vh[eBook]  aWashington, USAbSPIEc1992  aOnline resource  aProceedings of SPIE; V. 1674  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1674yClick Here to Access eBook