TY  - BOOK
AU  - Pol, Victor, ed.
TI  - Optical/Laser Microlithography IV
T2  - Proceedings of SPIE; V. 1463
SN  - 9780819405623 (Print)
PY  - 1991///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1463
ER  -