@book{30196,
	author = {Pol, Victor, ed.},
	title = {Optical/Laser Microlithography IV},
	publisher = {SPIE},
	year = {1991},
	series = {Proceedings of SPIE; V. 1463},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1463}
}