TY  - BOOK
AU  - Pol, Victor, ed.
TI  - Optical/Laser Microlithography III
T2  - Proceedings of SPIE; V. 1264
SN  - 9780819403117 (Print)
PY  - 1990///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1264
ER  -