00495nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002100092245004800113260003200161300002000193490003300213856010300246IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819403117 (Print)  cIIA Library  aPol, Victor, ed. 0aOptical/Laser Microlithography IIIh[eBook]  aWashington, USAbSPIEc1990  aOnline resource  aProceedings of SPIE; V. 1264  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1264yClick Here to Access eBook