@book{30195,
	author = {Pol, Victor, ed.},
	title = {Optical/Laser Microlithography III},
	publisher = {SPIE},
	year = {1990},
	series = {Proceedings of SPIE; V. 1264},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1264}
}