TY  - BOOK
AU  - Lin, Burn, ed.
TI  - Optical/Laser Microlithography II
T2  - Proceedings of SPIE; V. 1088
SN  - 9780819401236 (Print)
PY  - 1989///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1088
ER  -