00492nam a2200145Ia 4500003000900000008004100009020002600050040001600076100001900092245004700111260003200158300002000190490003300210856010300243IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819401236 (Print)  cIIA Library  aLin, Burn, ed. 0aOptical/Laser Microlithography IIh[eBook]  aWashington, USAbSPIEc1989  aOnline resource  aProceedings of SPIE; V. 1088  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1088yClick Here to Access eBook