@book{30193,
	author = {Cuthbert, John, ed.},
	title = {Optical/Laser Microlithography},
	publisher = {SPIE},
	year = {1993},
	series = {Proceedings of SPIE; V. 1927},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1927}
}