00529nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002900092245007400121260003200195300002000227490003300247856010300280IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892528127 (Print)  cIIA Library  aGlassford, A. Peter, ed. 0aOptical Systems Contamination: Effects, Measurement, Controlh[eBook]  aWashington, USAbSPIEc1987  aOnline resource  aProceedings of SPIE; V. 0777  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0777yClick Here to Access eBook