00761nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003600092245007600128260003200204300002000236490003300256856010300289942000700392999001700399952016300416IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819403902 (Print)  cIIA Library  aGlassford, A. Peter, ed.946517 0aOptical System Contamination: Effects, Measurement, Control IIh[eBook]  aWashington, USAbSPIEc1990  aOnline resource  aProceedings of SPIE; V. 1329  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1329yClick Here to Access eBook  cEB  c30050d30050  00104070aBANbBANd2011-07-01eSPIEhV. 1329l0pEB9510r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1329w2021-11-05yEB