00539nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002100119245005100140260003200191300002000223490003400243856010400277IN-BaIIA211028s9999 xx s 000 0 eng d a9781510628991 (Print) a9781510629004 (Online) cIIA Library aKahan, Mark, ed. 0aOptical Modeling and System Alignmenth[eBook] aWashington, USAbSPIEc2019 aOnline resource aProceedings of SPIE; V. 11103 uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/11103yClick Here to Access eBook