00533nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002100119245004500140260003200185300002000217490003400237856010400271IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510634213 (Print)  a9781510634220 (Online)  cIIA Library  aOwa, Soichi, ed. 0aOptical Microlithography XXXIIIh[eBook]  aWashington, USAbSPIEc2020  aOnline resource  aProceedings of SPIE; V. 11327  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/11327yClick Here to Access eBook