00534nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002300119245004400142260003200186300002000218490003400238856010400272IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510625693 (Print)  a9781510625709 (Online)  cIIA Library  aKye, Jongwook, ed. 0aOptical Microlithography XXXIIh[eBook]  aWashington, USAbSPIEc2019  aOnline resource  aProceedings of SPIE; V. 10961  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10961yClick Here to Access eBook