@book{29884,
	author = {Kye, Jongwook, ed.},
	title = {Optical Microlithography XXXII},
	publisher = {SPIE},
	year = {2019},
	series = {Proceedings of SPIE; V. 10961},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10961}
}