TY  - BOOK
AU  - Kye, Jongwook, ed.
TI  - Optical Microlithography XXXI
T2  - Proceedings of SPIE; V. 10587
SN  - 9781510616660 (Print)
PY  - 2018///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10587
ER  -