@book{29883,
	author = {Kye, Jongwook, ed.},
	title = {Optical Microlithography XXXI},
	publisher = {SPIE},
	year = {2018},
	series = {Proceedings of SPIE; V. 10587},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10587}
}