00535nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002600119245004200145260003200187300002000219490003400239856010400273IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510607453 (Print)  a9781510607460 (Online)  cIIA Library  aErdmann, Andreas, ed. 0aOptical Microlithography XXXh[eBook]  aWashington, USAbSPIEc2017  aOnline resource  aProceedings of SPIE; V. 10147  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10147yClick Here to Access eBook