@book{29882,
	author = {Erdmann, Andreas, ed.},
	title = {Optical Microlithography XXX},
	publisher = {SPIE},
	year = {2017},
	series = {Proceedings of SPIE; V. 10147},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10147}
}