TY  - BOOK
AU  - Lai, Kafai, ed.
TI  - Optical Microlithography XXVII
T2  - Proceedings of SPIE; V. 9052
SN  - 9780819499752 (Print)
PY  - 2014///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9052
ER  -