00490nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002000092245004400112260003200156300002000188490003300208856010300241IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819499752 (Print)  cIIA Library  aLai, Kafai, ed. 0aOptical Microlithography XXVIIh[eBook]  aWashington, USAbSPIEc2014  aOnline resource  aProceedings of SPIE; V. 9052  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9052yClick Here to Access eBook