@book{29880,
	author = {Lai, Kafai, ed.},
	title = {Optical Microlithography XXVII},
	publisher = {SPIE},
	year = {2014},
	series = {Proceedings of SPIE; V. 9052},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9052}
}