00493nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245004200117260003200159300002000191490003300211856010300244IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819489821 (Print)  cIIA Library  aConley, Willard, ed. 0aOptical Microlithography XXVh[eBook]  aWashington, USAbSPIEc2012  aOnline resource  aProceedings of SPIE; V. 8326  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8326yClick Here to Access eBook