@book{29878,
	author = {Conley, Willard, ed.},
	title = {Optical Microlithography XXV},
	publisher = {SPIE},
	year = {2012},
	series = {Proceedings of SPIE; V. 8326},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8326}
}