00725nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003300092245004300125260003200168300002000200490003300220856010300253942000700356999001700363952016300380IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510600157 (Print)  cIIA Library  aErdmann, Andreas, ed.946458 0aOptical Microlithography XXIXh[eBook]  aWashington, USAbSPIEc2016  aOnline resource  aProceedings of SPIE; V. 9780  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9780yClick Here to Access eBook  cEB  c29877d29877  00104070aBANbBANd2011-07-01eSPIEhV. 9780l0pEB9337r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9780w2021-11-05yEB