TY  - BOOK
AU  - Erdmann, Andreas, ed.
TI  - Optical Microlithography XXIX
T2  - Proceedings of SPIE; V. 9780
SN  - 9781510600157 (Print)
PY  - 2016///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9780
ER  -