@book{29877,
	author = {Erdmann, Andreas, ed.},
	title = {Optical Microlithography XXIX},
	publisher = {SPIE},
	year = {2016},
	series = {Proceedings of SPIE; V. 9780},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9780}
}