TY  - BOOK
AU  - Dusa, Mircea, ed.
TI  - Optical Microlithography XXIII
T2  - Proceedings of SPIE; V. 7640
SN  - 9780819480545 (Print)
PY  - 2010///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7640
ER  -