@book{29875,
	author = {Dusa, Mircea, ed.},
	title = {Optical Microlithography XXIII},
	publisher = {SPIE},
	year = {2010},
	series = {Proceedings of SPIE; V. 7640},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7640}
}