TY  - BOOK
AU  - Levinson, Harry, ed.
TI  - Optical Microlithography XXII
T2  - Proceedings of SPIE; V. 7274
SN  - 9780819475275 (Print)
PY  - 2009///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7274
ER  -