@book{29874,
	author = {Levinson, Harry, ed.},
	title = {Optical Microlithography XXII},
	publisher = {SPIE},
	year = {2009},
	series = {Proceedings of SPIE; V. 7274},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7274}
}