@book{29872,
	author = {Flagello, Donis, ed.},
	title = {Optical Microlithography XX},
	publisher = {SPIE},
	year = {2007},
	series = {Proceedings of SPIE; V. 6520},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6520}
}