TY  - BOOK
AU  - Smith, Bruce, ed.
TI  - Optical Microlithography XVIII
T2  - Proceedings of SPIE; V. 5754
SN  - 9780819457349 (Print)
PY  - 2005///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5754
ER  -