00492nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002200092245004400114260003200158300002000190490003300210856010300243IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819457349 (Print)  cIIA Library  aSmith, Bruce, ed. 0aOptical Microlithography XVIIIh[eBook]  aWashington, USAbSPIEc2005  aOnline resource  aProceedings of SPIE; V. 5754  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/5754yClick Here to Access eBook