@book{29871,
	author = {Smith, Bruce, ed.},
	title = {Optical Microlithography XVIII},
	publisher = {SPIE},
	year = {2005},
	series = {Proceedings of SPIE; V. 5754},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5754}
}