TY  - BOOK
AU  - Smith, Bruce, ed.
TI  - Optical Microlithography XVII
T2  - Proceedings of SPIE; V. 5377
SN  - 9780819452900 (Print)
PY  - 2004///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5377
ER  -