00491nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002200092245004300114260003200157300002000189490003300209856010300242IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819452900 (Print)  cIIA Library  aSmith, Bruce, ed. 0aOptical Microlithography XVIIh[eBook]  aWashington, USAbSPIEc2004  aOnline resource  aProceedings of SPIE; V. 5377  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/5377yClick Here to Access eBook