@book{29870,
	author = {Smith, Bruce, ed.},
	title = {Optical Microlithography XVII},
	publisher = {SPIE},
	year = {2004},
	series = {Proceedings of SPIE; V. 5377},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5377}
}