TY  - BOOK
AU  - Yen, Anthony, ed.
TI  - Optical Microlithography XVI
T2  - Proceedings of SPIE; V. 5040
SN  - 9780819448453 (Print)
PY  - 2003///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5040
ER  -