00725nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003200092245004200124260003400166300002000200490003300220856010300253942000700356999001700363952016300380IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819461971 (Print)  cIIA Library  aFlagello, Donis, ed.946448 0aOptical Microlithography XIXh[eBook]  aWashington, USAbSPIEc2006    aOnline resource  aProceedings of SPIE; V. 6154  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6154yClick Here to Access eBook  cEB  c29867d29867  00104070aBANbBANd2011-07-01eSPIEhV. 6154l0pEB9327r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6154w2021-11-05yEB