@book{29867,
	author = {Flagello, Donis, ed.},
	title = {Optical Microlithography XIX},
	publisher = {SPIE},
	year = {2006  },
	series = {Proceedings of SPIE; V. 6154},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6154}
}