TY  - BOOK
AU  - Progler, Christopher, ed.
TI  - Optical Microlithography XIII
T2  - Proceedings of SPIE; V. 4000
SN  - 9780819436184 (Print)
PY  - 2000///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4000
ER  -