00725nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003400092245004200126260003200168300002000200490003300220856010300253942000700356999001700363952016300380IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819431530 (Print)  cIIA Library  aVan den Hove, Luc, ed.946445 0aOptical Microlithography XIIh[eBook]  aWashington, USAbSPIEc1999  aOnline resource  aProceedings of SPIE; V. 3679  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3679yClick Here to Access eBook  cEB  c29864d29864  00104070aBANbBANd2011-07-01eSPIEhV. 3679l0pEB9324r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3679w2021-11-05yEB